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Румянцев, Юрий
Nikolaev Institute of Inorganic Chemistry of SB RAS
http://www.che.nsk.su
Russia, 630090, Novosibirsk, Acad. Lavrentieva ave., 3
Phone: +7(383) 330-94-90, Fax: +7(383) 330-94-89
Report
Румянцев Ю.
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,
Плеханов А.
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,
Файнер Н.
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,
Максимовский е.
*
,
Шаяпов В.
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,
Юшина И.
*
Hydrogenated silicon oxycarbonitride films - promising materials for opto - and nanoelectronics
*
Nikolaev Institute of Inorganic Chemistry of SB RAS (Novosibirsk), Russia
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