Nussupov K.K.   Beisenkhanov N.B.   Zharikov S.K.   Beisembetov I.K.   Professor B.K.   Akhmetov T.K.   Seitov B.Z.  

The formation of the SiC thin films on Si substrates by an ion beam sputtering

Reporter: Nussupov K.K.

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