Zyulkov I.J. Hikavyy A.
Strained SiGe layers growth with digermane/disilane precursors combination
Reporter: Zyulkov I.J.
Abstracts file: | Тезисы Кремний 2014.doc |
Presentation file: | Презентация.ppt |
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Abstracts file: | Тезисы Кремний 2014.doc |
Presentation file: | Презентация.ppt |